REACTION-MECHANISMS OF SI PT SYSTEMS UNDER PULSED HEAT-FLOW

被引：3

作者：

DANNA, E ^{[1
]}

DEBLASI, C ^{[1
]}

LEGGIERI, G ^{[1
]}

LUCHES, A ^{[1
]}

MAJNI, G ^{[1
]}

NAVA, F ^{[1
]}

机构：

[1] UNIV MODENA,DEPARTIMENTO FIS,I-41100 MODENA,ITALY

来源：

VACUUM | 1985年 / 35卷 / 01期

关键词：

D O I：

10.1016/0042-207X(85)90072-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：25 / 28

页数：4

共 8 条

[1]

[Anonymous], 1982, LASER ANNEALING SEMI

[2]

BATTAGLIN G, 1983, P MATERIALS RES SOC

[3] PRODUCTION AND CHARACTERIZATION OF PULSED LARGE-AREA HOMOGENOUS ELECTRON-BEAMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

NASSISI, V ;

PERRONE, A ;

PERRONE, MR ;

SIMMINI, R .

VACUUM, 1985, 35 (01) :19-23

[4] PULSED ANNEALING OF SILICON PLATINUM SYSTEMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

NASSISI, V ;

NAVA, F ;

NOBILI, C .

JOURNAL DE PHYSIQUE, 1983, 44 (NC-5) :421-425

[5] HEAT-FLOW TRANSIENTS IN SI/PT SYSTEMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

NAVA, F .

THIN SOLID FILMS, 1983, 110 (01) :83-92

[6]

LEGGIERI G, 1982, VACUUM, V32, P11

[7] COMPOUNDS IN THE PD-SI AND PT-SI SYSTEM OBTAINED BY ELECTRON-BOMBARDMENT AND POST-THERMAL ANNEALING [J].

MAJNI, G ;

NAVA, F ;

OTTAVIANI, G ;

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

CELOTTI, G .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (06) :4055-4061

[8]

WHITE CW, 1981, LASER ELECTRON BEAM

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