MEASUREMENTS OF LAYER THICKNESSES AND REFRACTIVE-INDEXES IN HIGH-ENERGY ION-IMPLANTED GAAS AND GAP

被引：25

作者：

KACHARE, AH

SPITZER, WG

FREDRICKSON, JE

EULER, FK

机构：

[1] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90007

[2] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007

[3] CALIF STATE UNIV LONG BEACH,DEPT PHYS ASTRON,LONG BEACH,CA 90840

[4] USAF,ROME AIR DEV CTR,HANSCOM AFB,MA 01731

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 12期

关键词：

D O I：

10.1063/1.322564

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：5374 / 5381

页数：8

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