HOT-CARRIER EFFECTS ON INTERFACE-TRAP CAPTURE CROSS-SECTIONS IN MOSFETS AS STUDIED BY CHARGE PUMPING

被引:10
作者
CHEN, WL [1 ]
BALASINSKI, A [1 ]
ZHANG, BL [1 ]
MA, TP [1 ]
机构
[1] YALE UNIV,DEPT ELECT ENGN,NEW HAVEN,CT 06520
关键词
D O I
10.1109/55.145020
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A rapid charge-pumping method was used to measure the interface-trap parameters in MOSFET's. The geometric mean of the electron and hole interface-trap capture cross sections decreases significantly (as much as two orders of magnitude) after Fowler-Nordheim (F-N) injection, and gradually recovers toward its original value. This effect is consistent with the interface-trap transformation process observed in MOS capacitors.
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页码:201 / 202
页数:2
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