TEMPERATURE DEPENDENCE OF SPUTTERING YIELDS OF GE (100) AND (110) SURFACES

被引：16

作者：

ANDERSON, GS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1966年 / 37卷 / 07期

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D O I：

10.1063/1.1782133

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2838 / &

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