SPUTTERING OF SINGLE-CRYSTAL COPPER AND ALUMINUM WITH 20-600 EV ARGON IONS

被引：19

作者：

ZDANUK, EJ

WOLSKY, SP

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1965年 / 36卷 / 05期

关键词：

D O I：

10.1063/1.1703109

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1683 / &

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