LASER-DRIVEN MOVEMENT OF 3-DIMENSIONAL MICROSTRUCTURES GENERATED BY LASER RAPID PROTOTYPING

被引：84

作者：

LEHMANN, O ^{[1
]}

STUKE, M ^{[1
]}

机构：

[1] MAX PLANCK INST BIOPHYS CHEM, D-37018 GOTTINGEN, GERMANY

来源：

SCIENCE | 1995年 / 270卷 / 5242期

关键词：

D O I：

10.1126/science.270.5242.1644

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Three-dimensional microstructures consisting of aluminum oxide and aluminum were fabricated by laser-induced direct-write deposition from the gas phase. Trimethylamine alane and oxygen were used as precursors. Thermal expansion forces resulting from suitable laser irradiation were used to drive the movement of microstructure parts. Applications include micromechanical actuators, such as microtweezers and micromotors. The one-step nature of the laser direct-write process allows rapid prototyping of such devices.

引用

页码：1644 / 1646

页数：3

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