A REVIEW OF REACTIVE ION-BEAM ETCHING FOR PRODUCTION

被引：18

作者：

REVELL, PJ

GOLDSPINK, GF

机构：

来源：

VACUUM | 1984年 / 34卷 / 3-4期

关键词：

D O I：

10.1016/0042-207X(84)90083-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：455 / 462

页数：8

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