STUDIES ON INHOMOGENEOUS TRANSPARENT OPTICAL COATINGS ON TRANSPARENT SUBSTRATES BY SPECTROSCOPIC ELLIPSOMETRY

被引：12

作者：

CHINDAUDOM, P ^{[1
]}

VEDAM, K ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIV PK,PA 16802

来源：

THIN SOLID FILMS | 1993年 / 234卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90302-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

By incorporating an achromatic three-reflection quarter-wave retarder in a spectroscopic ellipsometer and applying appropriate calibration and error correction procedures it has been possible to characterize fully real fluoride and oxide optical coatings which are truly inhomogeneous. The refractive index and its dispersion with wavelength as well as the depth profile of voids in the films have been determined for AlF3, CeF3, HfF4, LaF3, ScF3, YF3, Al2O3, HfO2, Sc2O3, ThO2, Y2O3, and ZrO2 films on vitreous silica substrates.

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收藏

页码：439 / 442

页数：4

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