PREPARATION OF PLATINUM SILICIDES BY REACTIVE SPUTTERING OF PT IN SIH4 PLASMA

被引：4

作者：

BUDHANI, RC

OBRIEN, BP

DOERR, HJ

DESHPANDEY, CV

BUNSHAH, RF

机构：

来源：

关键词：

D O I：

10.1063/1.334824

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5477 / 5482

页数：6

共 8 条

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[3]

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MURARKA, SP ;

KINSBRON, E ;

FRASER, DB ;

ANDREWS, JM ;

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[5]

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[6]

PEARSE RWB, 1976, IDENTIFICATION MOL S, P316

[7] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J].

POATE, JM ;

TISONE, TC .

[8]

SHUNK GFA, 1969, CONSTITUTION BINARY, P623