REDUCTION OF IRON SOLUBILITY IN SILICON WITH OXYGEN PRECIPITATES

被引：38

作者：

COLAS, EG

WEBER, ER

机构：

来源：

关键词：

D O I：

10.1063/1.96913

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1371 / 1373

页数：3

共 9 条

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[2]

COLAS EG, 1986, OXYGEN CARBON HYDROG

[3]

FAIR RB, 1985, IMPURITY DIFFUSION G, V36, P25

[4]

LUDWIG GW, 1962, SOLID STATE PHYS, V13, P223

PONCE, FA ;

YAMASHITA, T ;

HAHN, S .

[6]

WEAST RC, 1982, CRC HDB CHEM PHYSICS

[7] THE SOLUTION OF IRON IN SILICON [J].

WEBER, E ;

RIOTTE, HG .

[8] IRON AS A THERMAL DEFECT IN SILICON [J].

WEBER, E ;

RIOTTE, HG .

[9] TRANSITION-METALS IN SILICON [J].

WEBER, ER .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (01) :1-22