DEPENDENCE OF PROPERTIES OF HYDROGENATED MICROCRYSTALLINE AND AMORPHOUS-SILICON FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING IN INERT-GAS

被引：29

作者：

SAITO, N

SANNOMIYA, H

YAMAGUCHI, T

TANAKA, N

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 35卷 / 04期

关键词：

D O I：

10.1007/BF00617174

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：241 / 247

页数：7

共 12 条

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