VERY HARD SOLID-SOLUTION-TYPE TUNGSTEN CARBON COATINGS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING

被引:29
作者
PAULEAU, Y [1 ]
GOUYPAILLER, P [1 ]
机构
[1] CEN, CEREM, DEM, SGS 85X, F-38041 GRENOBLE, FRANCE
关键词
D O I
10.1016/0167-577X(92)90129-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Tungsten-carbon coatings have been deposited on stainless steel substrates by reactive magnetron sputtering in Ar-CH4 mixtures. The composition of coatings was determined by electron microprobe analyses. Only the cubic alpha-W phase with an expanded lattice parameter was detected by X-ray diffraction in the W-C coatings containing less than 25 at% of carbon. Since the lattice dilatation of the alpha-W phase increased with increasing carbon content these coatings were assumed to be tungsten-carbon solid solutions. The dilatation of the W crystal lattice and Vickers hardness of the solid-solution-type W-C coatings were measured as functions of the carbon concentration. A lattice dilatation-microhardness relationship was established.
引用
收藏
页码:157 / 160
页数:4
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