SECONDARY ION EMISSION FROM SI SUBJECTED TO OXYGEN ION-BOMBARDMENT

被引：13

作者：

OHWAKI, T

TAGA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 11期

关键词：

D O I：

10.1143/JJAP.23.1466

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1466 / 1469

页数：4

共 19 条

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