AS+ IMPLANTATION AND TRANSIENT ANNEALING OF MOSI2 THIN-FILMS

被引：2

作者：

AGAMY, SA

HO, VQ

NAGUIB, HM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573293

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：718 / 722

页数：5

共 11 条

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