DIRECT MEASUREMENT OF PROTON STRAGGLING IN GAALAS FOR NUCLEAR PROFILING

被引：1

作者：

BOND, AH ^{[1
]}

PARAYANTHAL, P ^{[1
]}

POLLAK, FH ^{[1
]}

WOODALL, JM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 09期

关键词：

D O I：

10.1063/1.333359

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3433 / 3436

页数：4

共 10 条

[1] CALCULATION OF ENERGY STRAGGLING FOR PROTONS AND HELIUM IONS [J].

CHU, WK .

PHYSICAL REVIEW A, 1976, 13 (06) :2057-2060

[2]

CHU WK, 1974, J ANAL CHEM, V46, P2136

[3] INTERFACE STUDIES OF ALXGA1-XAS-GAAS HETEROJUNCTIONS [J].

GARNER, CM ;

SU, CY ;

SPICER, WE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1521-1524

[4] ENERGY STRAGGLING OF HE-4 IONS BELOW 2.0 MEV IN AL, NI, AND AU [J].

HARRIS, JM ;

NICOLET, MA .

PHYSICAL REVIEW B, 1975, 11 (03) :1013-1019

[5] PREFERRED SPUTTERING ON BINARY ALLOY SURFACES OF THE AL-PD-SISYSTEM [J].

HO, PS ;

LEWIS, JE ;

CHU, WK .

SURFACE SCIENCE, 1979, 85 (01) :19-28

[6]

LUOMAJARVI M, 1976, ION BEAM SURFACE LAY, P75

[7] RAMAN-SCATTERING CHARACTERIZATION OF GA1-XALXAS/GAAS HETEROJUNCTIONS - EPILAYER AND INTERFACE [J].

PARAYANTHAL, P ;

POLLAK, FH ;

WOODALL, JM .

APPLIED PHYSICS LETTERS, 1982, 41 (10) :961-963

[8] NON-DESTRUCTIVE CHARACTERIZATION OF GA1-XALXAS-GAAS INTERFACES USING NUCLEAR PROFILING [J].

ROSNER, JS ;

LESSER, PMS ;

POLLAK, FH ;

WOODALL, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :584-588

[9]

SAHIA R, 1977, J ELECTRON MATER, V6, P645

[10]

TEMKIN H, 1983 EL MAT C BURL

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