HIGHEST CRYSTALLINITY OF A-AXIS YBCO FILMS BY DC-94.92 MHZ HYBRID PLASMA MAGNETRON SPUTTERING

被引：25

作者：

ITO, W ^{[1
]}

OISHI, A ^{[1
]}

OKAYAMA, S ^{[1
]}

YOSHIDA, Y ^{[1
]}

HOMMA, N ^{[1
]}

MORISHITA, T ^{[1
]}

HAGA, T ^{[1
]}

YAMAYA, K ^{[1
]}

机构：

[1] HOKKAIDO UNIV,DEPT NUCL ENGN,KITA KU,SAPPORO,HOKKAIDO 060,JAPAN

来源：

PHYSICA C | 1993年 / 204卷 / 3-4期

关键词：

D O I：

10.1016/0921-4534(93)91011-J

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The resputtering effects and the effect of oxygen partial pressure on the compositional deviation of films from the target in the process of a newly developed DC-94.92 MHz hybrid plasma magnetron sputtering have been investigated. The YBCO films have a-axis orientation. A full width at half maximum (FWHM) value of 0.027-degrees in the rocking curve through the (200) peak and chi(min). of 2.0% and 3.8% in the Rutherford backscattering channeling measurements were obtained, respectively, for the films on SrTiO3 and NdGaO3 substrates. The surfaces of the films were also very smooth.

引用

页码：295 / 298

页数：4

共 9 条

[1] SYNTHESIS AND PROPERTIES OF YBA2CU3O7 THIN-FILMS GROWN INSITU BY 90-DEGREES OFF-AXIS SINGLE MAGNETRON SPUTTERING [J].

EOM, CB ;

SUN, JZ ;

LAIRSON, BM ;

STREIFFER, SK ;

MARSHALL, AF ;

YAMAMOTO, K ;

ANLAGE, SM ;

BRAVMAN, JC ;

GEBALLE, TH .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 1990, 171 (3-4) :354-382

[2] CRYSTALLINITY OF A-AXIS ORIENTED YBA2CU3O7-DELTA THIN-FILMS EPITAXIALLY GROWN ON NDGAO3 (110) AND SRTIO3 (100) [J].

HOMMA, N ;

OKAYAMA, S ;

TAKAHASHI, H ;

KAWAMOTO, S ;

YOSHIDA, I ;

KAMEI, M ;

MORISHITA, T ;

HAGA, T ;

YAMAYA, K .

PHYSICA C, 1992, 194 (3-4) :430-434

[3] EXCITATION-FREQUENCY EFFECTS ON RF MAGNETRON SPUTTERING OF YBA2CU3O(7-DELTA) THIN-FILMS [J].

HOMMA, N ;

TAKAHASHI, H ;

OKAYAMA, S ;

MORISHITA, T ;

TANAKA, S .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (04) :813-818

[4]

HOMMA N, IN PRESS J MATER RES

[5] A-AXIS ORIENTED EPITAXIAL YBA2CU3O7-X-PRBA2CU3O7-Y HETEROSTRUCTURES [J].

INAM, A ;

ROGERS, CT ;

RAMESH, R ;

REMSCHNIG, K ;

FARROW, L ;

HART, D ;

VENKATESAN, T ;

WILKENS, B .

APPLIED PHYSICS LETTERS, 1990, 57 (23) :2484-2486

[6] GROWTH-CHARACTERIZATION OF YBA2CU3O7-X THIN-FILMS ON (100)MGO [J].

LI, Q ;

MEYER, O ;

XI, XX ;

GEERK, J ;

LINKER, G .

APPLIED PHYSICS LETTERS, 1989, 55 (03) :310-312

[7] PREPARATION AND PROPERTIES OF ULTRATHIN HIGH-TC SUPERCONDUCTING FILMS ON SI [J].

MYOREN, H ;

HARADA, K ;

MIYAMOTO, A ;

MIYAMOTO, N ;

OSAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (12B) :3896-3899

[8] FORMATION OF DEVICE-GRADE EPITAXIAL SILICON FILMS AT EXTREMELY LOW-TEMPERATURES BY LOW-ENERGY BIAS SPUTTERING [J].

OHMI, T ;

ICHIKAWA, T ;

IWABUCHI, H ;

SHIBATA, T .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (10) :4756-4766

[9] ION-CHANNELING STUDY OF SINGLE-CRYSTAL YBA2CU3OX [J].

STOFFEL, NG ;

MORRIS, PA ;

BONNER, WA ;

WILKENS, BJ .

PHYSICAL REVIEW B, 1988, 37 (04) :2297-2300

← 1 →