A NEW MACHINE FOR METAL-SURFACE TREATMENT BY DYNAMIC MIXING USING A HIGH-CURRENT ION-SOURCE

被引：19

作者：

SATO, T ^{[1
]}

OHATA, K ^{[1
]}

ASAHI, N ^{[1
]}

ONO, Y ^{[1
]}

OKA, Y ^{[1
]}

HASHIMOTO, I ^{[1
]}

机构：

[1] HITACHI LTD,KOKUBU WORKS,HITACHI,IBARAKI 316,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573813

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：784 / 787

页数：4

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