KINETICS OF TITANIUM SILICIDE FORMATION ON SINGLE-CRYSTAL SI - EXPERIMENT AND MODELING

[1] SPECIAL ASPECTS OF DIFFUSION IN THIN-FILMS [J]. THIN SOLID FILMS, 1975, 25 (02) : 363 - 392

[2] BARRETT CR, 1973, PRINCIPLES ENG MATER, pCH12

[3] BENTINI GG, 1985, J APPL PHYS, V51, P270

[4] METASTABLE PHASE FORMATION IN TITANIUM-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) : 5240 - 5245

[5] Cherns D., 1981, Defects in Semiconductors. Proceedings of the Materials Research Society Annual Meeting, P291

[6] LATTICE IMAGING OF METASTABLE TISI2 [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2275 - 2279

[7] Crank J, 1956, MATH DIFFUSION

[8] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3770 - &

[9] DHEURLE FM, 1987, MATER RES SOC S P, V77, P333

[10] INTERACTION OF EVAPORATED PALLADIUM AND TITANIUM FILMS WITH SINGLE-CRYSTAL SILICON [J]. THIN SOLID FILMS, 1980, 68 (02) : 393 - 405

[1] SPECIAL ASPECTS OF DIFFUSION IN THIN-FILMS [J]. THIN SOLID FILMS, 1975, 25 (02) : 363 - 392

[2] BARRETT CR, 1973, PRINCIPLES ENG MATER, pCH12

[3] BENTINI GG, 1985, J APPL PHYS, V51, P270

[4] METASTABLE PHASE FORMATION IN TITANIUM-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) : 5240 - 5245

[5] Cherns D., 1981, Defects in Semiconductors. Proceedings of the Materials Research Society Annual Meeting, P291

[6] LATTICE IMAGING OF METASTABLE TISI2 [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2275 - 2279

[7] Crank J, 1956, MATH DIFFUSION

[8] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3770 - &

[9] DHEURLE FM, 1987, MATER RES SOC S P, V77, P333

[10] INTERACTION OF EVAPORATED PALLADIUM AND TITANIUM FILMS WITH SINGLE-CRYSTAL SILICON [J]. THIN SOLID FILMS, 1980, 68 (02) : 393 - 405