INTERACTION OF EVAPORATED PALLADIUM AND TITANIUM FILMS WITH SINGLE-CRYSTAL SILICON

被引：31

作者：

FINSTAD, TG ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

关键词：

D O I：

10.1016/0040-6090(80)90271-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：393 / 405

页数：13

共 30 条

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