ELECTRICAL INSULATING PROPERTIES AND THERMAL-STABILITY OF RF-SPUTTERED ALUMINA COATINGS

被引：23

作者：

MANTYLA, TA

VUORISTO, PJM

TELAMA, AK

KETTUNEN, PO

机构：

来源：

THIN SOLID FILMS | 1985年 / 126卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90173-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：43 / 49

页数：7

共 15 条

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