MICROSTRUCTURE AND STABILITY OF RF-DIODE SPUTTERED GDTBFECO THIN-FILMS

被引：9

作者：

SHIEH, HPD ^{[1
]}

HONG, M ^{[1
]}

NAKAHARA, S ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 08期

关键词：

D O I：

10.1063/1.340692

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3627 / 3629

页数：3

共 8 条

[1] DC MAGNETRON-SPUTTERED AND DIODE-SPUTTERED POLYCRYSTALLINE FE AND AMORPHOUS TB(FECO) FILMS - MORPHOLOGY AND MAGNETIC-PROPERTIES [J].

HONG, M ;

GYORGY, EM ;

VANDOVER, RB ;

NAKAHARA, S ;

BACON, DD ;

GALLAGHER, PK .

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[2] MAGNETO-OPTIC RECORDING TECHNOLOGY [J].

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[3] THE EFFECTS OF DEPOSITION CONDITIONS ON MICROSTRUCTURE AND MAGNETIC-PROPERTIES OF TBFECO [J].

LEE, JW ;

SHIEH, HPD ;

KRYDER, MH ;

LAUGHLIN, DE .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) :3624-3626

[4] PROPERTIES AND STABILITY OF THIN-FILMS FOR MAGNETOOPTIC RECORDING [J].

LUBORSKY, FE .

IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :937-939

[5] MICROSTRUCTURES OF THIN SPUTTERED AMORPHOUS TB0.26FE0.74 AND POLYCRYSTALLINE FE FILMS [J].

NAKAHARA, S ;

HONG, M ;

VANDOVER, RB ;

GYORGY, EM ;

BACON, DD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :543-546

[6] EFFECTS OF AR PRESSURE AND SUBSTRATE BIAS ON MAGNETIC-PROPERTIES AND MICROSTRUCTURE IN AMORPHOUS TBCO SPUTTERED FILMS [J].

OHKOSHI, M ;

HARADA, M ;

TOKUNAGA, T ;

HONDA, S ;

KUSUDA, T .

IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1635-1637

[7]

SHIEH HPD, 1987, THESIS CARNEGIE MELL

[8] EFFECT OF OXIDATION ON THE MAGNETIC-PROPERTIES OF UNPROTECTED TBFE THIN-FILMS [J].

VANDOVER, RB ;

GYORGY, EM ;

FRANKENTHAL, RP ;

HONG, M ;

SICONOLFI, DJ .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (04) :1291-1296

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