MICROSTRUCTURES OF THIN SPUTTERED AMORPHOUS TB0.26FE0.74 AND POLYCRYSTALLINE FE FILMS

被引:11
作者
NAKAHARA, S
HONG, M
VANDOVER, RB
GYORGY, EM
BACON, DD
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573881
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:543 / 546
页数:4
相关论文
共 10 条
[1]   COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J].
DIRKS, AG ;
LEAMY, HJ .
THIN SOLID FILMS, 1977, 47 (03) :219-233
[2]   AGING EFFECTS ON AMORPHOUS TB-TRANSITION-METAL FILMS PREPARED BY DIODE AND MAGNETRON SPUTTERING [J].
HONG, M ;
BACON, DD ;
VANDOVER, RB ;
GYORGY, EM ;
DILLON, JF ;
ALBISTON, SD .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3900-3902
[3]  
HONG M, UNPUB
[4]   MICROSTRUCTURE OF PERMALLOY AND COPPER-FILMS OBTAINED BY VAPOR-DEPOSITION AT VARIOUS INCIDENCE ANGLES [J].
NAKAHARA, S ;
KUWAHARA, K ;
NISHIMURA, A .
THIN SOLID FILMS, 1980, 72 (02) :297-303
[5]  
Orlova I. G., 1977, RUSS J INORG CHEM, V22, P1387
[6]  
THEUERER HC, 1963, J APPL PHYS, V35, P554
[7]   HIGH-RATE THICK-FILM GROWTH [J].
THORNTON, JA .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 :239-260
[8]   MAGNETO-OPTIC DISK STORAGE [J].
TOGAMI, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1982, 18 (06) :1233-1237
[9]   INTRINSIC ANISOTROPY OF TB-FE FILMS PREPARED BY MAGNETRON CO SPUTTERING [J].
VANDOVER, RB ;
HONG, M ;
GYORGY, EM ;
DILLON, JF ;
ALBISTON, SD .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3897-3899
[10]  
VANDOVER RB, UNPUB