VELOCITY DEPENDENCE OF MAXIMUM SUBSTITUTIONAL CONCENTRATIONS OF IN AND BI TRAPPED IN RAPIDLY SOLIDIFIED SI

被引:10
作者
CAMPISANO, SU [1 ]
POATE, JM [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07924
关键词
D O I
10.1063/1.96100
中图分类号
O59 [应用物理学];
学科分类号
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页码:485 / 487
页数:3
相关论文
共 16 条
[1]   ORIENTATION AND VELOCITY DEPENDENCE OF SOLUTE TRAPPING IN SI [J].
BAERI, P ;
FOTI, G ;
POATE, JM ;
CAMPISANO, SU ;
CULLIS, AG .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :800-802
[2]  
BAERI P, 1981, APPL PHYS LETT, V37, P912
[3]  
Baeri P., 1982, LASER ANNEALING SEMI
[4]  
CAHN JW, 1980, LASER ELECTRON BEAM, P89
[5]   NON-EQUILIBRIUM DOPANTS INCORPORATION IN SILICON MELTED BY LASER-PULSES [J].
CAMPISANO, SU .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (04) :195-211
[6]   OSCILLATORY MORPHOLOGICAL INSTABILITIES DUE TO NON-EQUILIBRIUM SEGREGATION [J].
CORIELL, SR ;
SEKERKA, RF .
JOURNAL OF CRYSTAL GROWTH, 1983, 61 (03) :499-508
[7]   GROWTH INTERFACE BREAKDOWN DURING LASER RECRYSTALLIZATION FROM THE MELT [J].
CULLIS, AG ;
HURLE, DTJ ;
WEBBER, HC ;
CHEW, NG ;
POATE, JM ;
BAERI, P ;
FOTI, G .
APPLIED PHYSICS LETTERS, 1981, 38 (08) :642-644
[8]  
CULLIS AG, UNPUB
[9]  
FELDMAN LC, 1983, MATERIALS ANAL ION C
[10]   STABILITY OF PLANAR INTERFACE DURING SOLIDIFICATION OF DILUTE BINARY ALLOY [J].
MULLINS, WW ;
SEKERKA, RF .
JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) :444-&