THE SIMULATION OF HIGH-RESOLUTION IMAGES OF AMORPHOUS THIN-FILMS

被引：37

作者：

FAN, GY

COWLEY, JM

机构：

[1] Arizona State Univ, Tempe, AZ, USA, Arizona State Univ, Tempe, AZ, USA

来源：

ULTRAMICROSCOPY | 1987年 / 21卷 / 02期

关键词：

MICROSCOPIC EXAMINATION - Thin Films - SILICON AND ALLOYS - Thin Films;

D O I：

10.1016/0304-3991(87)90079-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Computer-simulated high resolution electron microscopy (HREM) images of white-noise weak phase objects show features similar to those observed in images of very thin films (2 nm) of amorphous silicon. Local patches of regular fringes arise as a result of the spatial-frequency filtering effect of the aperture and need not indicate the presence of microcrystalline regions. It is shown how drastically the appearance of a simulated amorphous image is influenced by the transfer function of the objective lens and by the objective aperture or equivalent damping of high-frequency components due to partial temporal and spatial coherence of the electron beam. Simulated images of through-focus series also show the same general appearance as for an amorphous silicon film.

引用

页码：125 / 130

页数：6

共 7 条

[1] COMPUTER-SIMULATION AND INTERPRETATION OF ELECTRON-MICROSCOPIC IMAGES OF AMORPHOUS STRUCTURES
BURSILL, LA
MALLINSON, LG
ELLIOTT, SR
THOMAS, JM
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1981, 85 (20) : 3004 - 3006
[2] COWLEY JM, 1981, DIFFRACTION PHYSICS, P288
[3] AUTOCORRELATION ANALYSIS OF HIGH-RESOLUTION ELECTRON-MICROGRAPHS OF NEAR-AMORPHOUS THIN-FILMS
FAN, GY
COWLEY, JM
[J]. ULTRAMICROSCOPY, 1985, 17 (04) : 345 - 355
[4] ORIGIN OF FRINGE STRUCTURE OBSERVED IN HIGH-RESOLUTION BRIGHT-FIELD ELECTRON-MICROGRAPHS OF AMORPHOUS MATERIALS
KRAKOW, W
AST, DG
GOLDFARB, W
SIEGEL, BM
[J]. PHILOSOPHICAL MAGAZINE, 1976, 33 (06): : 985 - 1014
[5] KRIVANEK OL, 1975, THESIS U CAMBRIDGE
[6] RUDEE ML, 1972, PHIL MAG, V25, P110
[7] ULTRA-HIGH-RESOLUTION ELECTRON-MICROSCOPY OF AMORPHOUS MATERIALS AT 120-KV
SMITH, DJ
STOBBS, WM
SAXTON, WO
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (05): : 907 - 923

← 1 →