PERIPHERAL ELECTRON-BEAM INDUCED CURRENT RESPONSE OF A SHALLOW P-N-JUNCTION

被引：18

作者：

HOLLOWAY, H

机构：

来源：

关键词：

D O I：

10.1063/1.332917

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3669 / 3675

页数：7

共 8 条

BERZ, F ;

KUIKEN, HK .

DAVIDSON, SM ;

DIMITRIADIS, CA .

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DIMITRIADIS, CA .

[4] ELECTRON-BEAM-INDUCED CURRENTS IN SEMICONDUCTORS [J].

HANOKA, JI ;

BELL, RO .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1981, 11 :353-380

[5] THEORY OF LATERAL-COLLECTION PHOTO-DIODES [J].

HOLLOWAY, H .

[6] PERIPHERAL PHOTORESPONSE OF A P-N-JUNCTION [J].

HOLLOWAY, H ;

BRAILSFORD, AD .

[7]

SMITH RA, 1978, SEMICONDUCTORS, pCH7

VANROOSBROECK, W .