GATED PHOTOLUMINESCENCE METHOD FOR INTERFACE STATE DENSITY DETERMINATION

被引:8
作者
IYER, R [1 ]
LILE, DL [1 ]
机构
[1] COLORADO STATE UNIV, DEPT ELECT ENGN, FT COLLINS, CO 80523 USA
关键词
D O I
10.1063/1.106559
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the use of gated photoluminescence (PL) to estimate interface state density in III-V metal-insulator-semiconductor (MIS) structures. Low-temperature PL measurements have been recorded as a function of bias applied to the semi-transparent gate of a MIS diode. An analysis of these data resulted in surface state densities in the low 10(10)/cm2 eV range on sulfur passivated SiO2 coated InP. The present technique is more sensitive than the conventional 1 MHz capacitance-voltage (C-V) method, and less dependent on low leakage currents in the dielectric, when compared to the quasi-static C-V technique.
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页码:754 / 756
页数:3
相关论文
共 10 条
[1]   SURFACE BAND BENDING EFFECTS ON PHOTO-LUMINESCENCE INTENSITY IN N-INP SCHOTTKY AND MIS DIODES [J].
ANDO, K ;
YAMAMOTO, A ;
YAMAGUCHI, M .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (06) :1107-1112
[2]   SURFACE STATES AT STEAM-GROWN SILICON-SILICON DIOXIDE INTERFACES [J].
BERGLUND, CN .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1966, ED13 (10) :701-+
[3]   ROLE OF POLYSULFIDES IN THE PASSIVATION OF THE INP SURFACE [J].
IYER, R ;
LILE, DL .
APPLIED PHYSICS LETTERS, 1991, 59 (04) :437-439
[4]   KINETICS OF LOW-PRESSURE CVD GROWTH OF SIO2 ON INP AND SI [J].
IYER, R ;
LILE, DL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) :691-697
[5]  
KRAWCZYK S, 1984, ELECTRON LETT, V20, P657
[6]   PHOTOLUMINESCENCE AS A TOOL FOR STUDY OF ELECTRONIC SURFACE PROPERTIES OF GALLIUM-ARSENIDE [J].
METTLER, K .
APPLIED PHYSICS, 1977, 12 (01) :75-82
[7]  
NICOLLIAN EH, 1982, MOS PHYSICS TECHNOLO
[8]   ENERGY AND ELECTRIC-FIELD DEPENDENCE OF SI-SIO2 INTERFACE STATE PARAMETERS BY OPTICALLY ACTIVATED ADMITTANCE EXPERIMENTS [J].
POON, TC ;
CARD, HC .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6273-6278
[9]  
SKROMME BJ, 1991, J ELECTRON MATER, V13, P437