POTENTIAL OF ALTERNATE DIELECTRICS FOR SINGLE AND COMPOSITE FILM FET GATE APPLICATIONS

被引：10

作者：

BALK, P ^{[1
]}

机构：

[1] TECH UNIV AACHEN,INST SEMICONDUCTOR ELECTR,SONDER FORSCH BEREICH FESTKORPER ELEKTR 56,AACHEN,FED REP GER

来源：

关键词：

D O I：

10.1007/BF02661167

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：635 / 662

页数：28

共 45 条

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BALK, P ;

STEPHANY, F .

[3]

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[4]

BERRY RW, 1968, THIN FILM TECHNOLOGY, P380

[5]

BUBE RH, 1960, PHOTOCONDUCTIVITY SO, P234

[6] DIELECTRIC MATERIALS IN SEMICONDUCTOR DEVICES [J].

CHU, TL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :25-+

[7]

Colby J. W., 1969, Thin film dielectrics, P491

[8]

FITZGIBBONS ET, 1971, MAY EL SOC M WASH

[9]

FROSCHLE E, 1973, OCT EL SOC M BOST

[10]

GERSTENBERG D, 1970, HDB THIN FILM TECHNO, P19