ION-BOMBARDMENT INDUCED CHANGES IN THE SURFACE-TOPOGRAPHY OF MBE-GROWN SILICON ON GALLIUM-PHOSPHIDE

被引:8
作者
BOUDEWIJN, PR
AKERBOOM, HWP
BULLELIEUWMA, CWT
HAISMA, J
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关键词
D O I
10.1002/sia.740070110
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:49 / 52
页数:4
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