HIGH-RESOLUTION ELECTRON-BEAM NEGATIVE RESIST WITH VERY NARROW MOLECULAR-WEIGHT DISTRIBUTIONS

被引：13

作者：

ITAYA, K ^{[1
]}

SHIBAYAMA, K ^{[1
]}

FUJIMOTO, T ^{[1
]}

机构：

[1] TECHNOL UNIV NAGAOKA,KAMITOMIOKA,NAGAOKA,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期

关键词：

D O I：

10.1149/1.2123944

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：663 / 665

页数：3

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[8]

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