STUFFING OF NOBLE-METALS INTO ANODIZED POROUS SILICON BY DIRECT EVAPORATION

被引:13
作者
ITO, T
HIRAKI, A
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 08期
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D O I
10.1143/JJAP.26.1219
中图分类号
O59 [应用物理学];
学科分类号
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页码:1219 / 1223
页数:5
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  • [1] Anzai K., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P796
  • [2] FORMATION AND PROPERTIES OF POROUS SILICON FILM
    ARITA, Y
    SUNOHARA, Y
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) : 285 - 295
  • [3] MICROSTRUCTURE AND FORMATION MECHANISM OF POROUS SILICON
    BEALE, MIJ
    CHEW, NG
    UREN, MJ
    CULLIS, AG
    BENJAMIN, JD
    [J]. APPLIED PHYSICS LETTERS, 1985, 46 (01) : 86 - 88
  • [4] PORE-SIZE DISTRIBUTION IN POROUS SILICON STUDIED BY ADSORPTION-ISOTHERMS
    BOMCHIL, G
    HERINO, R
    BARLA, K
    PFISTER, JC
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) : 1611 - 1614
  • [5] Chu W. K., 1978, BACKSCATTERING SPECT
  • [6] DETERMINATION OF THE FLUORINE DISTRIBUTION IN POROUS SILICON USING NUCLEAR-REACTION, XPS AND AUGER ANALYSES
    EARWAKER, LG
    FARR, JPG
    ALEXANDER, I
    STURLAND, IM
    KEEN, JM
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 481 - 484
  • [7] A LEED-AES STUDY OF THE GROWTH OF AG FILMS ON SI(100)
    HANBUCKEN, M
    NEDDERMEYER, H
    [J]. SURFACE SCIENCE, 1982, 114 (2-3) : 563 - 573
  • [8] POROUS SILICON FILMS - PREPARATION AND EXAMINATION WITH SURFACE AND OPTICAL METHODS
    HARDEMAN, RW
    BEALE, MIJ
    GASSON, DB
    KEEN, JM
    PICKERING, C
    ROBBINS, DJ
    [J]. SURFACE SCIENCE, 1985, 152 (APR) : 1051 - 1062
  • [9] NICKEL PLATING ON POROUS SILICON
    HERINO, R
    JAN, P
    BOMCHIL, G
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (10) : 2513 - 2514
  • [10] INITIAL FORMATION PROCESS OF METAL SILICON INTERFACES
    HIRAKI, A
    [J]. SURFACE SCIENCE, 1986, 168 (1-3) : 74 - 99