INTERDIFFUSION IN ALLOYS OF THE GAINASP SYSTEM

被引:16
作者
COHEN, RM
机构
[1] Department of Materials Science and Engineering, University of Utah, Salt Lake City
关键词
D O I
10.1063/1.353808
中图分类号
O59 [应用物理学];
学科分类号
摘要
Interdiffusion experiments and results for InP-GaInAs(P) heterostructures are reviewed and discussed within a thermodynamic model. Important factors affecting interdiffusion in the GaInAsP system are shown to include the (1) miscibility gap, (2) different diffusivities on each sublattice in each material, (3) Fermi level or impurity induced changes in diffusivity and perhaps diffusion mechanism, and (4) experimental technique chosen. With a miscibility gap present, the activity coefficients and solubilities of all species vary near a heterojunction and cause the interdiffusion to become strongly composition dependent. At commonly used growth and annealing temperatures, many superlattices are expected to equilibrate as two quaternary superlattices rather than a homogeneous alloy. Different diffusivities on each sublattice in a superlattice can lead to either a widening or a narrowing of quantum wells. When this occurs, optical measurements of the band gap energy are likely to be misleading because of quantum size effects. Diffusivity on each sublattice can be changed by the presence of group II, IV, or VI dopants. Diffusion on the group III sublattice in p-type GaInAsP is found to be consistent with an interstitialcy mechanism, but the mechanism remains unknown with n-type doping and for the group V sublattice. Diffusion experiments performed in closed, open, and capped environments are discussed. Poorly designed and controlled experiments are found to be associated with large discrepancies in observed diffusivities, unreliable concentration profiles, and new condensed phases appearing in the solid. Experiments to date indicate that the Cu-Pt ordered structure often found in GaIn(As)P epilayers are unstable, and not strain stabilized, relative to the disordered structure at commonly used growth and annealing temperatures.
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页码:4903 / 4915
页数:13
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共 38 条
[1]  
AMBREE P, 1990, APPL PHYS LETT, V56, P931, DOI 10.1063/1.102629
[2]  
CASEY HC, 1968, T METALL SOC AIME, V242, P406
[3]   DETERMINATION OF BAND OFFSETS AND EFFECTIVE MASSES IN QUANTUM WELLS USING OPTICAL-DATA [J].
COHEN, RM ;
FANG, ZM .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (02) :612-618
[4]   APPLICATION OF THE CHARGED POINT-DEFECT MODEL TO DIFFUSION AND INTERDIFFUSION IN GAAS [J].
COHEN, RM .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (12) :7268-7273
[5]   DISORDERING OF THE ORDERED STRUCTURE IN METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWN GA0.5IN0.5P ON (001) GAAS SUBSTRATES BY ZINC DIFFUSION [J].
DABKOWSKI, FP ;
GAVRILOVIC, P ;
MEEHAN, K ;
STUTIUS, W ;
WILLIAMS, JE ;
SHAHID, MA ;
MAHAJAN, S .
APPLIED PHYSICS LETTERS, 1988, 52 (25) :2142-2144
[6]   SURFACE-INDUCED ORDERING IN GAINP [J].
FROYEN, S ;
ZUNGER, A .
PHYSICAL REVIEW LETTERS, 1991, 66 (16) :2132-2135
[7]   MACROSCOPIC MECHANISM OF GROUP-V INTERDIFFUSION IN UNDOPED INGAAS/INP QUANTUM-WELLS GROWN BY MOVPE [J].
FUJII, T ;
SUGAWARA, M ;
YAMAZAKI, S ;
NAKAJIMA, K .
JOURNAL OF CRYSTAL GROWTH, 1990, 105 (1-4) :348-352
[8]   DIFFUSION IN COMPOUND SEMICONDUCTORS [J].
GOLDSTEIN, B .
PHYSICAL REVIEW, 1961, 121 (05) :1305-&
[9]   TRANSMISSION ELECTRON-MICROSCOPY STUDY OF THE EFFECT OF SELENIUM DOPING ON THE ORDERING OF GAINP2 [J].
GORAL, JP ;
KURTZ, SR ;
OLSON, JM ;
KIBBLER, A .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (01) :95-99
[10]   DIFFUSION OF ZINC IN INDIUM-PHOSPHIDE AT 700 DEGREES C [J].
HOOPER, A ;
TUCK, B ;
BAKER, AJ .
SOLID-STATE ELECTRONICS, 1974, 17 (06) :531-+