III-V-COMPOUND THIN-LAYER CHARACTERIZATION BY A CHEMICAL BEVEL ANGLE AUGER TECHNIQUE

被引：10

作者：

BRESSE, JF

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.336384

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2026 / 2030

页数：5

共 12 条

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