ION-IMPLANTATION .2. ION-IMPLANTATION IN NONELECTRONIC MATERIALS

被引：18

作者：

DEARNALEY, G

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 24-5卷

关键词：

D O I：

10.1016/0168-583X(87)90696-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：506 / 511

页数：6

共 37 条

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