VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY - APPLICATION TO GAAS-ALXGA1-XAS MULTIPLE HETEROSTRUCTURES

被引：99

作者：

SNYDER, PG ^{[1
]}

ROST, MC ^{[1
]}

BUABBUD, GH ^{[1
]}

WOOLLAM, JA ^{[1
]}

ALTEROVITZ, SA ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 09期

关键词：

D O I：

10.1063/1.337695

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3293 / 3302

页数：10

共 16 条

[1] Alterovitz S. A., 1981, Applied Physics Communications, V1, P163
[2] AN ENHANCED SENSITIVITY NULL ELLIPSOMETRY TECHNIQUE FOR STUDYING FILMS ON SUBSTRATES - APPLICATION TO SILICON-NITRIDE ON GALLIUM-ARSENIDE
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[3] ANALYTIC SOLUTIONS FOR OPTIMIZED ELLIPSOMETRIC MEASUREMENTS OF INTERFACES AND SURFACE-LAYERS IN THIN-FILM STRUCTURES
ALTEROVITZ, SA
BUABBUD, GH
WOOLLAM, JA
[J]. THIN SOLID FILMS, 1985, 123 (03) : 183 - 195
[4] Aspnes D. E., 1980, Handbook on semiconductors, vol.II. Optical properties of solids, P109
[5] OPTICAL-PROPERTIES OF GAAS AND ITS ELECTROCHEMICALLY GROWN ANODIC OXIDE FROM 1.5 TO 6.0 EV
ASPNES, DE
SCHWARTZ, GP
GUALTIERI, GJ
STUDNA, AA
SCHWARTZ, B
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : 590 - 597
[6] OPTICAL-PROPERTIES OF ALXGA1-XAS
ASPNES, DE
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BHAT, R
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 754 - 767
[7] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[8] Azzam RMA, 1977, ELLIPSOMETRY POLARIZ
[9] VARIABLE WAVELENGTH, VARIABLE ANGLE ELLIPSOMETRY INCLUDING A SENSITIVITIES CORRELATION TEST
BUABBUD, GH
BASHARA, NM
WOOLLAM, JA
[J]. THIN SOLID FILMS, 1986, 138 (01) : 27 - 41
[10] CHEMICAL AND STRUCTURAL-ANALYSIS OF THE GAAS/ALGAAS HETEROJUNCTIONS BY SPECTROSCOPIC ELLIPSOMETRY
ERMAN, M
THEETEN, JB
VODJDANI, N
DEMAY, Y
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (02): : 328 - 333

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