CHEMICAL AND STRUCTURAL-ANALYSIS OF THE GAAS/ALGAAS HETEROJUNCTIONS BY SPECTROSCOPIC ELLIPSOMETRY

被引：48

作者：

ERMAN, M

THEETEN, JB

VODJDANI, N

DEMAY, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582551

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：328 / 333

页数：6

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