ELECTRONIC-PROPERTIES OF METAL-INSULATOR-SEMICONDUCTOR DEVICES PREPARED ON THERMALLY TREATED INP IN PHOSPHORUS OVERPRESSURE

被引:15
作者
CHOUJAA, A
CHAVE, J
BLANCHET, R
VIKTOROVITCH, P
机构
关键词
D O I
10.1063/1.337177
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2191 / 2193
页数:3
相关论文
共 11 条
[1]   PREVENTION OF INP SURFACE DECOMPOSITION IN LIQUID-PHASE EPITAXIAL-GROWTH [J].
ANTYPAS, GA .
APPLIED PHYSICS LETTERS, 1980, 37 (01) :64-65
[2]  
BAILLY B, 8502 EC CTR LYON REP
[3]  
BLANCHET R, 1984, Patent No. 15573
[4]   EVAPORATION OF INP UNDER KNUDSEN (EQUILIBRIUM) AND LANGMUIR (FREE) EVAPORATION CONDITIONS [J].
FARROW, RFC .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (17) :2436-2448
[5]   INTERFACIAL PROPERTIES OF AL2O3-INP METAL-INSULATOR-SEMICONDUCTOR STRUCTURE PREPARED IN EXCESS ORGANO-PHOSPHORUS ATMOSPHERE [J].
KOBAYASHI, T ;
ICHIKAWA, T ;
SAKUTA, K ;
FUJISAWA, K .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3876-3878
[6]   N-CHANNEL INVERSION-MODE INP MISFET [J].
LILE, DL ;
COLLINS, DA ;
MEINERS, LG ;
MESSICK, L .
ELECTRONICS LETTERS, 1978, 14 (20) :657-659
[7]   THERMAL-DEGRADATION OF INP AND ITS CONTROL IN LPE GROWTH [J].
LUM, WY ;
CLAWSON, AR .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (08) :5296-5301
[8]  
NISHITANI Y, 1983, J ELECTROCHEM SOC, V130, P2081
[9]   CHANNEL MOBILITY ENHANCEMENT IN INP METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS [J].
PANDE, KP ;
GUTIERREZ, D .
APPLIED PHYSICS LETTERS, 1985, 46 (04) :416-418
[10]   HOMOEPITAXIAL MOLECULAR-BEAM GROWTH OF INP ON THERMALLY CLEANED (100) ORIENTED SUBSTRATES [J].
ROBERTS, JS ;
DAWSON, P ;
SCOTT, GB .
APPLIED PHYSICS LETTERS, 1981, 38 (11) :905-907