SPATIALLY RESOLVED OPTICAL-EMISSION STUDIES OF FLUOROCARBON RF PLASMA THROUGH THE USE OF UV-TRANSMITTING OPTICAL FIBERS

被引：26

作者：

SELWYN, GS ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1985年 / 5卷 / 02期

关键词：

D O I：

10.1007/BF00566214

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：183 / 199

页数：17

共 32 条

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