INFLUENCE OF ELECTRON LITHOGRAPHY ON ELECTRICAL PARAMETERS OF MOS STRUCTURES

被引：1

作者：

OSVALD, J

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1985年 / 90卷 / 02期

关键词：

D O I：

10.1002/pssa.2210900269

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：K225 / K227

页数：3

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