PROBLEMS OF QUANTITATIVE AUGER ANALYSIS OF TINX THIN-FILMS - PEAK OVERLAPPING AND LINE-SHAPE CHANGES

被引：30

作者：

PAMLER, W

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 13卷 / 01期

关键词：

D O I：

10.1002/sia.740130112

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：55 / 60

页数：6

共 40 条

[1] INVESTIGATION OF TIN FILMS REACTIVELY SPUTTERED USING A SPUTTER GUN [J].

AHN, KY ;

WITTMER, M ;

TING, CY .

THIN SOLID FILMS, 1983, 107 (01) :45-54

[2]

Bassett P. J., 1973, Journal of Electron Spectroscopy and Related Phenomena, V2, P101, DOI 10.1016/0368-2048(73)80052-0

[3] X-RAY-EMISSION-SPECTROSCOPY STUDY OF VACANCY-INDUCED ELECTRONIC STATES IN SUBSTOICHIOMETRIC TINX [J].

BEAUPREZ, E ;

HAGUE, CF ;

MARIOT, JM ;

TEYSSANDIER, F ;

REDINGER, J ;

MARKSTEINER, P ;

WEINBERGER, P .

PHYSICAL REVIEW B, 1986, 34 (02) :886-890

[4] INVESTIGATION OF TITANIUM AND TITANIUM HYDRIDE BY AES AND EELS [J].

BRACCONI, P ;

LASSER, R .

APPLIED SURFACE SCIENCE, 1987, 28 (03) :204-214

[5] PHOTOEMISSION RESONANCE EFFECTS IN THE NITRIDES OF TITANIUM AND ZIRCONIUM [J].

BRINGANS, RD ;

HOCHST, H .

PHYSICAL REVIEW B, 1984, 30 (10) :5416-5420

[6] A CORRELATION OF AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND RUTHERFORD BACKSCATTERING SPECTROMETRY MEASUREMENTS ON SPUTTER-DEPOSITED TITANIUM NITRIDE THIN-FILMS [J].

BURROW, BJ ;

MORGAN, AE ;

ELLWANGER, RC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2463-2469

[7] NITROGEN SORPTION ON TITANIUM - RECONSTRUCTION OF THE SUBSURFACE COMPOSITION PROFILE USING LOW-ENERGY AND HIGH-ENERGY AUGER DATA [J].

DAWSON, PT ;

TZATZOV, KK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1345-1351

[8] LOW-ENERGY AUGER-ELECTRON SPECTROSCOPY OF TITANIUM NITRIDES FOR QUANTITATIVE-ANALYSIS [J].

DAWSON, PT ;

TZATZOV, KK .

SURFACE SCIENCE, 1986, 171 (02) :239-254

[9] QUANTITATIVE AUGER-ELECTRON ANALYSIS OF TITANIUM NITRIDES [J].

DAWSON, PT ;

TZATZOV, KK .

SURFACE SCIENCE, 1985, 149 (01) :105-118

[10]

DUC BM, 1980, J ELECTRON SPECTROSC, V20, P213

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