共 17 条
[1]
Andersen H. H., 1984, Ion implantation and beam processing, P127
[2]
AUCOUTURIER M, 1988, 5TH C QUANT SURF AN
[3]
DARQUECERETTI E, IN PRESS NUCL I METH
[4]
DECOTEAU MD, 1990, IN PRESS PHYS STATUS
[6]
GRAFF K, 1981, SEMICONDUCTOR SILICO, P331
[10]
REGH J, 1968, ELECTROCHEM TECHNOL, V6, P155