DETERMINATION OF OPTICAL-CONSTANTS - NULL-METHOD FOR NON-ABSORBING SURFACE FILMS

被引：9

作者：

JUNGK, G ^{[1
]}

机构：

[1] DAWB,ZENT INST ELEKTRONENPHYS,DDR-108 BERLIN,DEUTSCH DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 34卷 / 01期

关键词：

D O I：

10.1002/pssa.2210340103

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：69 / 72

页数：4

共 10 条

[1] COMBINED REFLECTION AND TRANSMISSION THIN-FILM ELLIPSOMETRY - UNIFIED LINEAR ANALYSIS [J].

AZZAM, RMA ;

ELSHAZLYZAGHLOUL, M ;

BASHARA, NM .

APPLIED OPTICS, 1975, 14 (07) :1652-1663

[2] ELLIPSOMETRIC FUNCTION OF A FILM-SUBSTRATE SYSTEM - APPLICATIONS TO DESIGN OF REFLECTION-TYPE OPTICAL DEVICES AND TO ELLIPSOMETRY [J].

AZZAM, RMA ;

ZAGHLOUL, ARM ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (03) :252-260

[3]

Born M., 1959, PRINCIPLES OPTICS

[4] Determination of Optical Constants: A Null-Method [J].

Jungk, G. .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1970, 3 (04) :965-970

[5]

JUNGK G, TO BE PUBLISHED

[6] OPTICAL PROPERTIES OF NON-CRYSTALLINE SI, SIO, SIOX AND SIO2 [J].

PHILIPP, HR .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1971, 32 (08) :1935-&

[7] ELLIPSOMETRIC TECHNIQUE FOR OBTAINING SUBSTRATE OPTICAL CONSTANTS [J].

SHEWCHUN, J ;

ROWE, EC .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (10) :4128-&

[8] GENERALIZED ELLIPSOMETRIC METHOD FOR ABSORBING SUBSTRATE COVERED WITH A TRANSPARENT-FILM SYSTEM - OPTICAL-CONSTANTS OF SILICON AT 3655 A [J].

SO, SS ;

VEDAM, K .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (01) :16-&

[9] ELLIPSOMETRIC METHOD FOR DETERMINATION OF ALL OPTICAL PARAMETERS OF SYSTEM OF AN ISOTROPIC NONABSORBING FILM ON AN ISOTROPIC ABSORBING SUBSTRATE . OPTICAL CONSTANTS OF SILICON [J].

VEDAM, K ;

KNAUSENBERGER, W ;

LUKES, F .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1969, 59 (01) :64-+

[10]

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