COMBINED REFLECTION AND TRANSMISSION THIN-FILM ELLIPSOMETRY - UNIFIED LINEAR ANALYSIS

被引：34

作者：

AZZAM, RMA ^{[1
]}

ELSHAZLYZAGHLOUL, M ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

APPLIED OPTICS | 1975年 / 14卷 / 07期

关键词：

D O I：

10.1364/AO.14.001652

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1652 / 1663

页数：12

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