SILICIDES FORMATION FOR REFRACTORY-METAL ALLOYS (TA-V AND TI-V) ON SI

被引：20

作者：

APPELBAUM, A

EIZENBERG, M

机构：

[1] TECHNION ISRAEL INST TECHNOL,DEPT MAT ENGN,IL-32000 HAIFA,ISRAEL

[2] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 08期

关键词：

D O I：

10.1063/1.334271

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2341 / 2345

页数：5

相关论文

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