CMOS SOI HARDENING AT 100 MRAD(SIO2)

被引:40
作者
LERAY, JL [1 ]
DUPONTNIVET, E [1 ]
PERE, JF [1 ]
COIC, YM [1 ]
RAFFAELLI, M [1 ]
AUBERTONHERVE, AJ [1 ]
BRUEL, M [1 ]
GIFFARD, B [1 ]
MARGAIL, J [1 ]
机构
[1] CEA,F-38019 GRENOBLE,FRANCE
关键词
D O I
10.1109/23.101223
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Hardened CMOS/SOI 29101 microprocessor, elementary cells and transistors have been irradiated at levels between 10 Mrad(SiO2) and 1 Grad(SiO2) (60Co and 10 keV x-rays). SIMOX buried oxide behavior in the range of 100 Mrad(SiO2) and a channel-stopped MOS/SOI structure avoiding lateral leakage current are presented. These two items indicate the feasibility of a CMOS/SOI technology operating in the hundred Mrad(SiO2) range. © 1990 IEEE
引用
收藏
页码:2013 / 2019
页数:7
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