GROWTH OF TERNARY INXGA1-XAS BULK CRYSTALS WITH A UNIFORM COMPOSITION THROUGH SUPPLY OF GAAS

被引:41
作者
NAKAJIMA, K
KUSUNOKI, T
TAKENAKA, C
机构
[1] Fujitsu Laboratories Ltd. Atsugi, Atsugi, 243-01
关键词
D O I
10.1016/0022-0248(91)90083-H
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Ternary In0.14Ga0.86As bulk crystals with a uniform composition were found to be grown at a constant temperature by continuously supplying the depleted solute elements of Ga and As to the growth melt. The pseudo-binary InAs-GaAs melts were used as the growth melts. Compositionally graded <111B> InxGa1-xAs (0.05 less-than-or-equal-to x less-than-or-equal-to 0.08) crystals were used as seed crystals. The liquid encapsulated Czochralski (LEC) technique with a method of supplying GaAs source material was used to grow the ternary bulk crystals. Polycrystalline GaAs was used as a source material. A 4 mm thick and uniform In0.14Ga0.86As single crystal was obtained.
引用
收藏
页码:485 / 490
页数:6
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