共 22 条
[1]
ANDRES JW, 1990, THESIS U N CAROLINA
[2]
ANDREWS JW, 1990, SPIE P, V1118, P162
[3]
DIELECTRIC FUNCTION AND SURFACE MICROROUGHNESS MEASUREMENTS OF INSB BY SPECTROSCOPIC ELLIPSOMETRY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1980, 17 (05)
:1057-1060
[4]
STUDIES OF SURFACE, THIN-FILM AND INTERFACE PROPERTIES BY AUTOMATIC SPECTROSCOPIC ELLIPSOMETRY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 18 (02)
:289-295
[6]
INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY
[J].
PHYSICAL REVIEW B,
1979, 20 (08)
:3292-3302
[8]
CHANG RPH, 1980, APPL PHYS LETT, V36, P399
[9]
MEASUREMENTS OF ATTACHMENT OF LOW-ENERGY ELECTRONS TO OXYGEN MOLECULES
[J].
PHYSICAL REVIEW,
1962, 128 (01)
:219-&
[10]
EVIDENCE FOR THE OCCURRENCE OF SUBCUTANEOUS OXIDATION DURING LOW-TEMPERATURE REMOTE PLASMA ENHANCED DEPOSITION OF SILICON DIOXIDE FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:576-580