GAS THERMAL-CONDUCTIVITY SENSOR-BASED ON SAW

被引：13

作者：

ANISIMKIN, VI

PENZA, M

OSIPENKO, VA

VASANELLI, L

机构：

[1] CNRSM,PASTIS,I-72100 BRINDISI,ITALY

[2] RES INST EXCLUS PURE MAT,MOSCOW 103907,RUSSIA

[3] UNIV LECCE,I-73100 LECCE,ITALY

[4] CNR,IME,I-73100 LECCE,ITALY

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1995年 / 42卷 / 06期

关键词：

D O I：

10.1109/58.476539

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

An uncoated surface acoustic wave (SAW) delay line integrated with a suitable film heater is used as a gas sensitive element based on thermal conductivity change, It detects concentrations from 0.1-100% of H-2, O-2, He, and Ar in N-2 in the temperature range from 20-150 degrees C. The value and sign of the SAW gas response are controlled by substrate material and reference gas.

引用

页码：978 / 980

页数：3

共 14 条

[1]

Caliendo C., 1992, GAS SENSORS, P281

[2]

DIAS JF, 1975, IEEE T SON ULTRASON, VSU22, P46

[3] ACOUSTIC-WAVE THERMAL SENSITIVITY - TEMPERATURE TEMPERATURE COMPENSATION IN MICROSENSORS [J].