STRUCTURE AND PURITY OF EPITAXIAL-FILMS OF COPPER AND RHODIUM DEPOSITED ONTO MGO SINGLE-CRYSTAL SUBSTRATES BY GLOW-DISCHARGE SPUTTERING

被引：19

作者：

DELPLANCKE, MP

DELCAMBE, P

BINST, L

JARDINIEROFFERGELD, M

BOUILLON, F

机构：

[1] Univ Libre de Bruxelles, Brussels, Belg, Univ Libre de Bruxelles, Brussels, Belg

来源：

THIN SOLID FILMS | 1986年 / 143卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90145-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

COPPER AND ALLOYS

引用

收藏

页码：43 / 51

页数：9

相关论文

共 12 条

[1] RECENT ADVANCES IN EPITAXY
BAUER, E
POPPA, H
[J]. THIN SOLID FILMS, 1972, 12 (01) : 167 - +
[2] COMPOSITIONAL DEPTH PROFILING BY AUGER-ELECTRON SPECTROSCOPY
HALL, PM
MORABITO, JM
[J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1978, 8 (01): : 53 - 67
[3] HONJO G, 1980, CURRENT TOPICS MATER, V6, pCH3
[4] EFFECT OF ANNEALING ON STRUCTURE OF THIN RHODIUM FILMS
KOSHY, J
[J]. THIN SOLID FILMS, 1978, 51 (02) : L17 - L20
[5] EVAPORATION OF RHODIUM FILMS ONTO SINGLE-CRYSTAL SILVER FILMS AND MICA CLEAVAGES
KOSHY, J
[J]. THIN SOLID FILMS, 1977, 41 (01) : L13 - L15
[6] KOSHY J, 1976, THIN SOLID FILMS, V38, P331
[7] SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV
LAEGREID, N
WEHNER, GK
[J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) : 365 - &
[8] LUKENGE K, UNPUB MATER CHEM PHY
[9] Maissel L.I., 1970, HDB THIN FILM TECHNO
[10] GROWTH AND STRUCTURE OF EPITAXIAL RHODIUM FILMS
MILLER, RF
KOSHY, J
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (11) : 1472 - &