COMPOSITIONAL DEPTH PROFILING BY AUGER-ELECTRON SPECTROSCOPY

被引：27

作者：

HALL, PM ^{[1
]}

MORABITO, JM ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1978年 / 8卷 / 01期

关键词：

D O I：

10.1080/10408437808243617

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：53 / 67

页数：15

共 50 条

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[10] APPLICATION OF TAILORED MODULATION TECHNIQUES TO DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY [J].

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