OPTICAL WAVE-GUIDE DETECTION - PHOTODETECTOR ARRAY FORMED ON THE WAVE-GUIDE UTILIZING LASER RECRYSTALLIZED SILICON

被引:8
作者
WU, RW
BOYD, JT
TIMLIN, HA
JACKSON, HE
JANNING, JL
机构
[1] UNIV CINCINNATI, DEPT PHYS, CINCINNATI, OH 45221 USA
[2] NCR, DIV MICROELECTR, MIAMISBURG, OH 45342 USA
关键词
D O I
10.1063/1.95915
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:498 / 500
页数:3
相关论文
共 9 条
  • [1] INTEGRATED-OPTIC SPECTRUM ANALYZER
    BARNOSKI, MK
    CHEN, BU
    JOSEPH, TR
    LEE, JYM
    RAMER, OG
    [J]. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS, 1979, 26 (12): : 1113 - 1124
  • [2] USE OF SELECTIVE ANNEALING FOR GROWING VERY LARGE GRAIN SILICON ON INSULATOR FILMS
    COLINGE, JP
    DEMOULIN, E
    BENSAHEL, D
    AUVERT, G
    [J]. APPLIED PHYSICS LETTERS, 1982, 41 (04) : 346 - 347
  • [3] GRAIN-BOUNDARY STATES AND THE CHARACTERISTICS OF LATERAL POLYSILICON DIODES
    DEGRAAFF, HC
    HUYBERS, M
    DEGROOT, JG
    [J]. SOLID-STATE ELECTRONICS, 1982, 25 (01) : 67 - 71
  • [4] DIODE CHARACTERISTICS IN LASER-RECRYSTALLIZED AND CONVENTIONAL POLYCRYSTALLINE SILICON
    EGGERMONT, GEJ
    DEGROOT, JG
    [J]. ELECTRON DEVICE LETTERS, 1982, 3 (06): : 156 - 158
  • [5] IMPROVEMENT IN THE QUANTUM EFFICIENCY OF SILICON PHOTODETECTORS AT NEAR IR WAVELENGTHS BY EDGE ILLUMINATION
    FAN, CL
    BOYD, JT
    [J]. APPLIED OPTICS, 1983, 22 (20): : 3297 - 3299
  • [6] Hunsperger R., 1984, INTEGRATED OPTICS TH, V2nd ed.
  • [7] LASKY JB, 1982, J APPL PHYS, V53, P9038, DOI 10.1063/1.330412
  • [8] SILICON PHOTODETECTOR INTEGRATED ON A LITHIUM TANTALATE SUBSTRATE
    REEDY, RE
    LEE, SH
    [J]. APPLIED PHYSICS LETTERS, 1984, 44 (01) : 19 - 21
  • [9] AMORPHOUS-SILICON PHOTO-VOLTAIC DETECTORS FOR GUIDED-WAVE OPTICS
    YUMOTO, J
    YAJIMA, H
    SEKI, Y
    SHIMADA, J
    NAKAJIMA, M
    [J]. APPLIED PHYSICS LETTERS, 1982, 40 (07) : 632 - 633